2026.09.24
TECHNICAL RESOURCES

Before you order a PECVD graphite boat

A practical review of equipment interfaces, wafer positioning, material requirements and inspection scope.

Treat the boat as a complete assembly

Confirm wafer format and loading arrangement together with the equipment’s mechanical interfaces. Plate spacing, contact parts and connection components should correspond to the same approved assembly revision.

Define the material requirements

Specify the graphite grade or required properties, including any purity and porosity requirements and the documents needed for acceptance. These are process-specific requirements and should be reviewed before quotation.

Agree the inspection scope

Identify critical dimensions, locating features, assembly checks and reporting requirements. For replacement projects, include the existing part reference and drawing revision.

Use the bilingual project worksheet

Download our English / Chinese inquiry and receiving checklist. It includes fields for equipment, wafer format, loading, grade, quantity, inspection and delivery requirements.

Industry references

These links provide general industry context. They do not establish a particular grade, dimension or capacity for UNITY GLOCAL products.

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